1013326-86-7

Basic information

• Product Name: C₂₀H₂₃F₂O₅S^(1-)*Na⁽¹⁺⁾
• Synonyms: C₂₀H₂₃F₂O₅S^(1-)*Na⁽¹⁺⁾
• CAS NO: 1013326-86-7
• Molecular Weight: 436.452
• Mol File: 1013326-86-7.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: C₂₀H₂₃F₂O₅S^(1-)*Na⁽¹⁺⁾(CAS DataBase Reference)
• NIST Chemistry Reference: C₂₀H₂₃F₂O₅S^(1-)*Na⁽¹⁺⁾(1013326-86-7)
• EPA Substance Registry System: C₂₀H₂₃F₂O₅S^(1-)*Na⁽¹⁺⁾(1013326-86-7)

Safety Data

• Hazardous Substances Data: 1013326-86-7(Hazardous Substances Data)

Upstream product

• 912289-98-6 difluorosulfoacetic acid sodium salt 
• 38584-37-1 1-hydroxy-3-hydroxymethyladamantane 
• 108-88-3 toluene 

Relevant articles and documents

Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same

The present invention provides a salt represented by the formula (I): wherein X represents a C3-C30 divalent group containing at least one divalent alicyclic hydrocarbon group, and at least one —CH2— in the C3-C30 divalent group may be substituted with —O— or —CO—, Y represents a C3-C30 cyclic hydrocarbon group which may be substituted with at least one group selected from a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group and a cyano group, and at least one —CH2— in the C3-C30 cyclic hydrocarbon group may be substituted with —O— or —CO—, Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, and A+ represents an organic counter ion.