1375457-72-9Relevant articles and documents
Manufacturing method (by machine translation)
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, (2016/12/12)
PROBLEM TO BE SOLVED: To provide a method for preparation of a salt used for an acid generator etc., in a resist composition. SOLUTION: The salt represented by formula (I) [wherein, Q1and Q2represent each a fluorine atom or a 1-6C perfluoroalkyl group, Y represents a 1-18C hydrocarbon group which may have a substituted group, and Z+represents an organic cation] is prepared by reacting a compound represented by formula (II) (Q1, Q2and Y represent each the same in the above ), a salt represented by formula (III) [wherein Z+represents an organic cation, and X-represents an anion] and water in the presence of an organic base. COPYRIGHT: (C)2012,JPO&INPIT