100752-61-2Relevant articles and documents
SALT, ACID GENERATOR, RESIST COMPOSITION, AND METHOD FOR PRODUCING RESIST PATTERN
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Paragraph 0224, (2020/04/24)
PROBLEM TO BE SOLVED: To provide a salt capable of producing a resist pattern having good CD uniformity (CDU), and a resist composition containing the salt. SOLUTION: The salt represented by formula (I) and the resist composition are provided. [In the formula, R1 represents a hydrogen atom or an alkyl group and R2 represents an alkyl group, provided that R1 and R2 represent different alkyl groups when R1 is an alkyl group, and -CHR1R2 represents a branched alkyl group when R1 is a hydrogen atom; R3 represents a halogen atom, a fluorinated alkyl group or an alkyl group; m3 represents an integer of 0-4; R4 and R5 each represent a hydrogen atom, a hydroxy group or a hydrocarbon group; m4 and m5 each represent an integer of 1-3; X represents a single bond, -CH2-, -CO-, -O- or -S-; and AI- represents an organic anion.] SELECTED DRAWING: None COPYRIGHT: (C)2020,JPOandINPIT
1,2-Di(4-isobutylphenyl)hydrocarbon and its preparation and uses as intermediate
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, (2008/06/13)
Novel compounds of 1,2-di(isobutylphenyl)ethane and 1,2-di(isobutylphenyl)ethylene, method for producing the same and method for preparing 4-isobutylstyrene and α-(4-isobutylphenyl)propionic acid from any of these compounds. In the preparation of 4-isobut