119571-35-6Relevant articles and documents
Method for, producing compound-containing compound, and composition for forming organic film (by machine translation)
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Paragraph 0138-0139, (2020/01/12)
The compound can be cured, under the film-forming conditions not only in the air but also in the inert, gas, without the heat resistance of the, by-product and the embedded or planarized characteristic of the pattern formed on the, substrate, 2 (1 - 1). In the, Ar formula, R represents an aromatic ring which may have a substituent or an aromatic ring 1 containing two or more, 2 of Ar the nitrogen atom and the sulfur atom; may be linked Y to each other, Y to form a ring structure represented by the dotted line having, a substituent 6-30 2 3 ;R 1-68 1. (by machine translation)