1422369-06-9

Basic information

• Product Name: C₁₈H₁₅S⁽¹⁺⁾*C₁₉H₂₇F₂O₈S^(1-)
• Synonyms: C₁₈H₁₅S⁽¹⁺⁾*C₁₉H₂₇F₂O₈S^(1-)
• CAS NO: 1422369-06-9
• Molecular Weight: 716.864
• Mol File: 1422369-06-9.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: C₁₈H₁₅S⁽¹⁺⁾*C₁₉H₂₇F₂O₈S^(1-)(CAS DataBase Reference)
• NIST Chemistry Reference: C₁₈H₁₅S⁽¹⁺⁾*C₁₉H₂₇F₂O₈S^(1-)(1422369-06-9)
• EPA Substance Registry System: C₁₈H₁₅S⁽¹⁺⁾*C₁₉H₂₇F₂O₈S^(1-)(1422369-06-9)

Safety Data

• Hazardous Substances Data: 1422369-06-9(Hazardous Substances Data)

Upstream product

• 942619-42-3 C₂HF₂O₅S^(1-)*C₁₈H₁₅S⁽¹⁺⁾ 
• 1422369-04-7 C₁₇H₂₈O₄ 
• 297156-50-4 2-isopropyl-2-adamantyl methacrylate 

Relevant articles and documents

SALT, PHOTORESIST COMPOSITION AND METHOD FOR PRODUCING PHOTORESIST PATTERN

A photoresist composition which comprises a salt represented by formula (I): wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, R1, R2 and R3 each independently represent a hydrogen atom or a C1-C10 monovalent aliphatic saturated hydrocarbon group, X1 and X2 each independently represent a single bond, a carbonyl group, or a C1-C10 divalent aliphatic saturated hydrocarbon group where a hydrogen atom can be replaced by a hydroxy group and where a methylene group can be replaced by an oxygen atom, a sulfonyl group or a carbonyl group, A1 represents a C1-C30 organic group, m1 represents an integer of 1 to 4, and Z+ represents an organic cation, and a resin which is hardly soluble or insoluble but soluble in an aqueous alkali solution by action of an acid.