26346-84-9Relevant articles and documents
CARBOXYLATE, CARBOXYLIC ACID GENERATOR, RESIST COMPOSITION, AND METHOD FOR PRODUCING RESIST PATTERN
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Paragraph 0217, (2020/12/01)
PROBLEM TO BE SOLVED: To provide a carboxylate, a carboxylic acid generator, and a resist composition capable of producing a resist pattern with good line edge roughness (LER). SOLUTION: A salt represented by formula (I) and a resist composition containing the same are provided. [In the formula, R1-R6 each independently represent a halogen atom or the like; R7 and R8 each independently represent a halogen atom or the like; R9 represents a hydrogen atom or an alkyl group, provided that -CH2- in the group may be substituted with -O- or -CO-; m7 and m8 each represent an integer of 0-2; m9 represents an integer of 0-5; and X0 represents an optionally substituted hydrocarbon group.] SELECTED DRAWING: None COPYRIGHT: (C)2021,JPOandINPIT