3936-10-5

Basic information

• Product Name: 1,1-difluoro-2-oxo-(phenylamino)ethanesulfonic acid fluoride
• Synonyms: 1,1-difluoro-2-oxo-(phenylamino)ethanesulfonic acid fluoride
• CAS NO: 3936-10-5
• Molecular Weight: 253.202
• Mol File: 3936-10-5.mol
• Article Data: 5

Chemical Properties

• CAS DataBase Reference: 1,1-difluoro-2-oxo-(phenylamino)ethanesulfonic acid fluoride(CAS DataBase Reference)
• NIST Chemistry Reference: 1,1-difluoro-2-oxo-(phenylamino)ethanesulfonic acid fluoride(3936-10-5)
• EPA Substance Registry System: 1,1-difluoro-2-oxo-(phenylamino)ethanesulfonic acid fluoride(3936-10-5)

Safety Data

• Hazardous Substances Data: 3936-10-5(Hazardous Substances Data)

Upstream product

• 677-67-8 fluorosulfonyldifluoroacetyl fluoride 
• 62-53-3 aniline 
• 697-18-7 tetrafluoroethane-β-sultone 

Downstream Products

• 1402074-34-3 1,1,1-trifluoro-3-(2-methyl-1,3-dioxan-2-yl)propan-2-yl difluoro(phenylcarbamoyl)methanesulfonate 
• 1402074-32-1 2,2,2-trifluoro-1-(6,10-dioxaspiro[4.5]decan-1-yl)ethyl1,1-difluoro-2-oxo-2-(phenylamino)ethanesulfonate 
• 1354651-59-4 N-phenyl-α,α-difluoro-γ-(n-butyl)-γ-lactam 
• 1354651-58-3 N-phenyl-5-acetyloxy-2,2-difluoro-4-iodo-pentanamide 
• 1354651-57-2 N-phenyl-2,2-difluoro-4-iodo-5-phenyl-pentanamide 
• 1354651-56-1 N-phenyl-2,2-difluoro-5-hydroxy-4-iodo-pentanamide 
• 1354651-55-0 N-phenyl-2,2-difluoro-4-iodo-4-(trimethylsilyl)butanamide 
• 1354651-54-9 N-phenyl-2,2-difluoro-4-iodo-octanamide 

Relevant articles and documents

NON-IONIC LOW DIFFUSING PHOTO-ACID GENERATORS

Non-ionic photo-acid generating (PAG) compounds were prepared that contain an aryl ketone group. The disclosed non-polymeric PAGs release a strong sulfonic acid when exposed to high energy radiation such as deep UV or extreme UV light. The photo-generated sulfonic acid has a low diffusion rate in an exposed resist layer subjected to a post-exposure bake (PEB) at 100° C. to 150° C., resulting in formation of good line patterns after development. At higher temperatures, the PAGs undergo a thermal reaction to form a sulfonic acid.

STABLE ACID AMPLIFIER

PROBLEM TO BE SOLVED: To provide an acid amplifier system which can be used for photolithography, especially for use in extreme UV (13.5 nm) or electron beam lithography. SOLUTION: This invention provides a sulfonic acid precursor compound represented by

Copper-mediated fluoroalkylation reactions with iododifluoroacetamides: Controlling the selectivity among cross-coupling, intramolecular cyclization, and homocoupling reactions

Cu-mediated fluoroalkylation reactions with iododifluoroacetamides 1 have been systematically investigated. It was found that three types of reactions may coexist in Cu-mediated reactions between iododifluoroacetamides and aryl/alkenyl iodides: cross-coupling, intramolecular cyclization, and homocoupling reactions. The selectivity among these three types of reactions could be controlled by tuning the substituents on the nitrogen atom of iododifluoroacetamides, and/or by removing the cross-coupling reaction partner (aryl/alkenyl halides). The general rule is as follows: (a) in the presence of proper aryl/alkenyl iodides, the cross-coupling products 2 (or 6) are generally formed as the major products; (b) in the absence of aryl/alkenyl iodides, and when R1 = alkyl and R2 = aryl groups, or when R 1 = R2 = aryl groups, the intramolecular cyclization products 3 can be formed predominantly; and (c) in the absence of aryl/alkenyl iodides, and when R1 = R2 = alkyl groups, or when R 1 = H and R2 = alkyl, aryl groups, the homocoupling products 4 can be formed dominantly. Our experimental results also indicate that in many cases when cross-coupling, homocoupling, and intramolecular cyclization reactions coexist in the Cu-mediated reaction system, the reactivity decreases in the following order: cross-coupling > intramolecular cyclization > homocoupling.