474888-51-2

Basic information

• Product Name: 4-methoxy-3,5-dimethyl phenyl dimethyl sulfonium nonatriflate
• Synonyms: 4-methoxy-3,5-dimethyl phenyl dimethyl sulfonium nonatriflate
• CAS NO: 474888-51-2
• Molecular Weight: 496.415
• Mol File: 474888-51-2.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: 4-methoxy-3,5-dimethyl phenyl dimethyl sulfonium nonatriflate(CAS DataBase Reference)
• NIST Chemistry Reference: 4-methoxy-3,5-dimethyl phenyl dimethyl sulfonium nonatriflate(474888-51-2)
• EPA Substance Registry System: 4-methoxy-3,5-dimethyl phenyl dimethyl sulfonium nonatriflate(474888-51-2)

Safety Data

• Hazardous Substances Data: 474888-51-2(Hazardous Substances Data)

Upstream product

• 29420-49-3 potassium nonaflate 
• 77-78-1 dimethyl sulfate 

Relevant articles and documents

Photoresist composition for deep ultraviolet lithography comprising a mixture of photoactive compounds

The present invention relates to a novel photoresist composition that can be developed with an aqueous alkaline solution, and is capable of being imaged at exposure wavelengths in the deep ultraviolet. The invention also relates to a process for imaging the novel photoresist as well as novel photoacid generators.