681258-74-2

Basic information

• Product Name: C₃₃H₃₃N₃O₁₅
• Synonyms: C₃₃H₃₃N₃O₁₅
• CAS NO: 681258-74-2
• Molecular Weight: 711.636
• Mol File: 681258-74-2.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: C₃₃H₃₃N₃O₁₅(CAS DataBase Reference)
• NIST Chemistry Reference: C₃₃H₃₃N₃O₁₅(681258-74-2)
• EPA Substance Registry System: C₃₃H₃₃N₃O₁₅(681258-74-2)

Safety Data

• Hazardous Substances Data: 681258-74-2(Hazardous Substances Data)

Upstream product

• 2451-62-9 teroxirone 
• 99-96-7 4-hydroxy-benzoic acid 

Relevant articles and documents

BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES

Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.