80548-27-2Relevant articles and documents
Compound, resin, and a method for manufacturing a resist pattern a resist composition (by machine translation)
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, (2020/01/31)
[A] producing a resist pattern having a good edge roughness (LER) compound, resin and resist composition. [Solution] a compound represented by formula (IB) or formula (IA), as a resin containing a structural unit derived from a resist composition. Formula (IA): CH2 =C (R1 ) - X1 - L1 (- OR3 ) (- OR4 ) (- OR5 ), Formula (IB): CH2 =C (R1 ) - X1 - L1 (- X2 - C (R2 )=CH2 ) (- OR3 ) (- OR4 ). [R1 And R2 The, H or a methyl group; X1 X and2 The, O - (=O) or - C; L1 The, substituted/unsubstituted C1 a-48 hydrocarbon group; R3 , R4 And R5 R (=O) [...] e C23 As a; R23 The, 1 - 6 alkyl group having carbon number F. ][Drawing] no (by machine translation)
Process for the Preparation of (Meth)Acrylates of Tetra-Or Polyhydric Alcohols
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Page/Page column 3, (2008/12/07)
Process for the preparation of acrylic and methacrylic acid esters by transesterification of (meth)acrylic acid esters of the formula I: where R1 is H or CH3 and R2 is an alkyl radical having 1 to 40 carbon atoms, with alkanols which have four or more esterifiable hydroxyl groups, characterized in that 0.01 to 10% by weight, based on the total reaction mixture, of lithium amide catalysts are used as transesterification catalyst.