860530-91-2

Basic information

• Product Name: 2,6-dimethoxy-9,10-diphenyl-9,10-dihydro-anthracene-9,10-diol
• Synonyms: 2,6-dimethoxy-9,10-diphenyl-9,10-dihydro-anthracene-9,10-diol
• CAS NO: 860530-91-2
• Molecular Weight: 424.496
• Mol File: 860530-91-2.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: 2,6-dimethoxy-9,10-diphenyl-9,10-dihydro-anthracene-9,10-diol(CAS DataBase Reference)
• NIST Chemistry Reference: 2,6-dimethoxy-9,10-diphenyl-9,10-dihydro-anthracene-9,10-diol(860530-91-2)
• EPA Substance Registry System: 2,6-dimethoxy-9,10-diphenyl-9,10-dihydro-anthracene-9,10-diol(860530-91-2)

Safety Data

• Hazardous Substances Data: 860530-91-2(Hazardous Substances Data)

Upstream product

• 963-96-2 2,6-dimethoxy-9,10-anthracenedione 
• 108-86-1 bromobenzene 

Downstream Products

• 725737-44-0 2,6-dimethoxy-9,10-diphenyl-anthracene 

Relevant articles and documents

COMPOUND FOR HARD MASK, HARD MASK COMPOSITION COMPRISING SAID COMPOUND, AND METHOD FOR FORMING SEMICONDUCTOR ELEMENT FINE PATTERN USING SAID COMPOUND

The present invention relates to a compound for a hard mask, a hard mask composition comprising the same, and a method for forming a fine pattern of a semiconductor element using the same. The compound for a hard mask according to the present invention has high solvent solubility that can be applied to a spin coating method, and thus it is possible to prepare a hard mask composition that not onlyhas excellent gap filling performance, but also has excellent heat resistance and etching resistance after curing. In addition, it is possible to provide a fine pattern forming method of a semiconductor element using the same.