935441-94-4

Basic information

• Product Name: triphenylsulfonium 1,1-difluoro-2-tosyloxyethanesulfonate
• Synonyms: triphenylsulfonium 1,1-difluoro-2-tosyloxyethanesulfonate
• CAS NO: 935441-94-4
• Molecular Weight: 578.679
• Mol File: 935441-94-4.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: triphenylsulfonium 1,1-difluoro-2-tosyloxyethanesulfonate(CAS DataBase Reference)
• NIST Chemistry Reference: triphenylsulfonium 1,1-difluoro-2-tosyloxyethanesulfonate(935441-94-4)
• EPA Substance Registry System: triphenylsulfonium 1,1-difluoro-2-tosyloxyethanesulfonate(935441-94-4)

Safety Data

• Hazardous Substances Data: 935441-94-4(Hazardous Substances Data)

Upstream product

• 4270-70-6 triphenylsulfonium chloride 

Relevant articles and documents

Novel fluorosulfonyloxyalkyl sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process

Sulfonate salts have the formula: R1SO3-CH(Rf)-CF2SO3-M+ wherein R1 is alkyl or aryl, Rf is H or trifluoromethyl, and M+ is a Li, Na, K, ammonium or tetramethylammonium ion. Onium salts, oximesulfonates and sulfonyloxyimides and other compounds derived from these sulfonate salts are effective photoacid generators in chemically amplified resist compositions.