95175-52-3

Basic information

• Product Name: 2-Propenoic acid, 2-methyl-, 2-(phenylthio)ethyl ester
• CAS NO: 95175-52-3
• Molecular Formula: C12H14O2S
• Molecular Weight: 222.308
• Mol File: 95175-52-3.mol
• Article Data: 2

Chemical Properties

• CAS DataBase Reference: 2-Propenoic acid, 2-methyl-, 2-(phenylthio)ethyl ester(CAS DataBase Reference)
• NIST Chemistry Reference: 2-Propenoic acid, 2-methyl-, 2-(phenylthio)ethyl ester(95175-52-3)
• EPA Substance Registry System: 2-Propenoic acid, 2-methyl-, 2-(phenylthio)ethyl ester(95175-52-3)

Safety Data

• Hazardous Substances Data: 95175-52-3(Hazardous Substances Data)

Upstream product

• 760-93-0 methacryloyl anhydride 
• 699-12-7 2-(phenylthio)ethanol 
• 80-62-6 methacrylic acid methyl ester 

Relevant articles and documents

Salt and resist compsn.

PROBLEM TO BE SOLVED: To provide a salt for an acid-generating agent of a resist composition giving resist patterns having an excellent resolution and line edge roughness.SOLUTION: There are provided salts represented by formula (I). [Wherein, Rand Rrepresent F or a 1-6C perfluoroalkyl; Xrepresents a divalent 1-17C saturated hydrocarbon; Yrepresents a (substituted) 1-18C aliphatic hydrocarbon or a (substituted) 3-18C saturated cyclic hydrocarbon; Rand Reach represent a 1-6C alkyl, a 3-10C cycloalkyl or a 6-18C aromatic hydrocarbon; Xrepresents a divalent 1-17C saturated hydrocarbon; Xrepresents -C(R)=CHor -O-CO-C(R)=CH; and Rrepresents H or methyl].