Octafluorocyclobutane

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Application:In the production semiconductor materials and devices, octafluorocyclobutane serves as a deposition gas and etchant.
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Purity: 99.999% Oxygen: 1ppmv Air: 3ppmv Water: 3ppmv Other Organics: 10ppmv Acidity as HF: 0.1ppmv Application In the production semiconductor…

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Purity: 99.999% Oxygen: 1ppmv Air: 3ppmv Water: 3ppmv Other Organics: 10ppmv Acidity as HF: 0.1ppmv Application In the production semiconductor materials and devices, octafluorocyclobutane serves as a deposition gas and etchant. It has also been investigated as a refrigerant in specialised applications, as a replacement for ozone depleting chlorofluorocarbon refrigerants. Exploiting its volatility and chemical inertness, octafluorocyclobutane may be found in some aerosolized foods. It is listed by the Codex Alimentarius under number E946. It is investigated as a possible replacement for sulfur hexafluoride as a dielectric gas.

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