1379588-26-7

Basic information

• Product Name: C₅H₇F₄O₆S^(1-)*C₂₁H₂₁S⁽¹⁺⁾
• Synonyms: C₅H₇F₄O₆S^(1-)*C₂₁H₂₁S⁽¹⁺⁾
• CAS NO: 1379588-26-7
• Molecular Weight: 576.63
• Mol File: 1379588-26-7.mol
• Article Data: 2

Chemical Properties

• CAS DataBase Reference: C₅H₇F₄O₆S^(1-)*C₂₁H₂₁S⁽¹⁺⁾(CAS DataBase Reference)
• NIST Chemistry Reference: C₅H₇F₄O₆S^(1-)*C₂₁H₂₁S⁽¹⁺⁾(1379588-26-7)
• EPA Substance Registry System: C₅H₇F₄O₆S^(1-)*C₂₁H₂₁S⁽¹⁺⁾(1379588-26-7)

Safety Data

• Hazardous Substances Data: 1379588-26-7(Hazardous Substances Data)

Upstream product

• 1415833-07-6 C₅H₅F₄O₄S^(1-)*C₂₁H₂₁S⁽¹⁺⁾ 
• 73606-13-0 2-Allyloxy-1,1,2,2-tetrafluoro-ethanesulfonyl fluoride 
• 1328587-74-1 CH₃O₄S^(1-)*C₂₁H₂₁S⁽¹⁺⁾ 

Downstream Products

• 1415833-13-4 C₁₉H₂₇F₄O₈S^(1-)*C₂₁H₂₁S⁽¹⁺⁾ 
• 1415833-11-2 C₁₆H₂₁F₄O₇S^(1-)*C₂₁H₂₁S⁽¹⁺⁾ 
• 1402927-27-8 C₁₆H₁₉F₄O₈S^(1-)*C₂₁H₂₁S⁽¹⁺⁾ 
• 1415833-40-7 C₂₁H₂₁S⁽¹⁺⁾*C₃₅H₃₉F₁₂O₁₂S^(1-) 

Relevant articles and documents

Salt, the composition and production of resist pattern

PROBLEM TO BE SOLVED: To provide a salt to be used for a resist composition that allows production of a resist pattern with excellent pattern collapse resistance.SOLUTION: The salt is expressed by the formula (I). In the formula, Qand Qrepresent a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms; Lrepresents a carbonyl group or -CF-; Xrepresents a single bond, a divalent saturated hydrocarbon group having 1 to 14 carbon atoms which may have a substituent, or a group expressed by formula (a-1); c is 0 or 1; and X, X, A, Aand Aeach represent a specified group.