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663951-33-5

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663951-33-5 Usage

Check Digit Verification of cas no

The CAS Registry Mumber 663951-33-5 includes 9 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 6 digits, 6,6,3,9,5 and 1 respectively; the second part has 2 digits, 3 and 3 respectively.
Calculate Digit Verification of CAS Registry Number 663951-33:
(8*6)+(7*6)+(6*3)+(5*9)+(4*5)+(3*1)+(2*3)+(1*3)=185
185 % 10 = 5
So 663951-33-5 is a valid CAS Registry Number.

663951-33-5Relevant articles and documents

Toward environmentally friendly photolithographic materials: A new class of water-soluble photoresists

Yamada, Shintaro,Mrozek, Thomas,Rager, Timo,Owens, Jordan,Rangel, Jose,Willson, C. Grant,Byers, Jeffery

, p. 377 - 384 (2007/10/03)

New water-soluble styrenic polymers bearing two functional groups, pendant ammonium salts of half-esters of malonic acids and acid-labile alkyl esters, were synthesized and evaluated for water-soluble positive-tone photoresist application. These polymers feature two solubility switches: insolubilization of the entire film by baking and selective solubilization upon exposure to UV light. Time-resolved FT-IR measurement of the baked films showed sequential evaporation of ammonia from the films and the decarboxylation of the malonate half-esters. The rates of decarboxylation depend on the structure of substituents at the 2-position of the malonates. The choice of acid-labile esters, the structure of the half-esters, and the polymer compositions were carefully optimized, and high-resolution positive tone images were obtained that were fully processed in aqueous media.

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