Hexafluoro-1,3-butadiene (C4F6); hexafluorobutadiene

Min.Order / FOB Price:Get Latest Price

5 Kilogram	Negotiable

5 Kilogram

Negotiable

Min.Order :5 Kilogram
Purity: 99% min
Payment Terms : L/C,T/T

Keywords

Hexafluoro-1,3-butadiene perfluorobutadiene hexafluorobutadiene

Quick Details

Appearance:Liquified Gas
Application:A new generation of semiconductor etching gas
PackAge:4.64L/10.2L/44L Cylinder
ProductionCapacity:50|Metric Ton|Year
Storage:Protect from sunlight. Store in a well-ventilated place. Store away from heat.
Transportation:

Superiority:

In fluorine chemical, Yuji Tech has been dedicated to R&D of production of ODS alternatives, fluoropolymers and fluorinated fine chemicals for years, and has become an international leading innovation enterprise in fluorine chemical research and production. Yuji Tech has undertaken the projects of Development and Industrialization of ODS Alternatives from Ministry of Environmental Protection and Development and Industrialization of ODS Alternatives from the Industry and Information Technology Department of Shaanxi Province. In 2014, the project Development and Application of the Manufacturing and Catalytic Technology of Zero ODP and Environmentally Friendly Fluorides by Yuji Tech won the second prize of Beijing Science and Technology Award. In 2016, Yuji Tech won the first prize of "Shaanxi Provincial Science and Technology Award". In 2017, Yuji Tech won the second prize of “State Science and Technology Invention Award”. At present, Yuji Tech has applied for 62 invention patents, of which 20 have been granted. Yuji Tech's main fluorine chemicals cover refrigerants, blowing agents, aerosol propellants, fire extinguishing agents, cleaning agents, electronic gases, Insulating gases, isocyanates, perfluoroalky iodides, fluorinated intermediates, fluoropolymers, etc.

Details:

Hexafluoro-1,3-butadiene/C4F6

Hexafluoro-1,3-butadiene (C4F6) is an environmentally friendly dry etching gas with low GWP, high etching rate, high selectivity and high aspect ratio, showing very high performance for critical plasma etching in semiconductor devices manufacturing.

Product Description

Items	Specification
Chemical Name	Hexafluoro-1,3-butadiene, Perfluorobutadiene
Chemical formula	CF2=CF-CF=CF2
Molecular formula	C4F6
CAS NO.	685-63-2
Molecular weight (g/mol)	162.03
ODP	0
GWP100 yr	260
Atmospheric lifetime (days)	＜1

Physical & Chemical Properties

Attributes	Values
Chemical Name	Hexafluoro-1,3-butadiene, Perfluorobutadiene
Boiling point (℃)	-6.5
Freezing point (℃)	-130
Critical temperature (℃)	139.6
Critical pressure (bar)	31.9
Liquid density (kg/l, @15℃)	1.44
Vapor density (kg/m3, @15℃)	6.8
Vapor pressure (bar, @25℃)	2.11
Heat of vaporization (kJ/kg，@b.p.)	161.8
Explosion limits (%vol)	7-73

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