Ethane,1,1,1,2,2,2-hexafluoro-

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Purity Grade customized Formula C2F6 Application Hexafluoroethane is used as a versatile etchant in semiconductor manufacturing. It can be …

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Purity Grade customized Formula C2F6 Application Hexafluoroethane is used as a versatile etchant in semiconductor manufacturing. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon.Together with trifluoromethane it is used in refrigerants R508A (61%) and R508B (54%). Molecular Weight 138.01g /mol Alternative name Carbon hexafluoride,1,1,1,2,2,2-Hexafluoroethane,Perfluoroethane, Ethforane, Halocarbon 116, PFC-116, CFC-116, R-116, Arcton 116, Halon 2600 Package N/A

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