WF6

Min.Order / FOB Price:Get Latest Price

5 Metric Ton	FOB Price:USD 1.0000 -2.0000

5 Metric Ton

FOB Price:USD 1.0000 -2.0000

Min.Order :5 Metric Ton
Purity: 99.99%
Payment Terms : L/C,T/T

Keywords

WF6 Tungsten hexafluoride CAS: 7783-82-6

Quick Details

Appearance:colorless gas
Application: tungsten chemical vapor deposition
PackAge:cylinder or as required
ProductionCapacity:5000|Metric Ton|Year
Storage:cylinder
Transportation:By sea

Superiority:

Product Description

Tungsten(VI) fluoride, also known as tungsten hexafluoride, is an inorganic compound with the formula WF6. It is a toxic, corrosive, colorless gas, with a density of about 13 g/L (roughly 11 times heavier than air. It is one of the heaviest known gases under standard conditions. WF6 is commonly used by the semiconductor industry to form tungsten films, through the process of chemical vapor deposition. This layer serves as a low-resistivity metallic "interconnect".

Specifications

Tungsten Hexafluoride WF6 GAS

CAS No.: 7783-82-6

EINECS No.: 232-029-1

UN No.: UN2196

Purity: 99.999%

Dot Class: 2.3

Appearance: Colorless

Grade Standard: Electron Grade,Industrial Grade

Details:

CF4	<0.5 ppmV	B	≤10 ppbW	Ti	≤10 ppbW
O2	<0.5 ppmV	Ca	≤5 ppbW	Li	≤10 ppbW
N2	<1 ppmV	Cd	≤2 ppbW	U	≤0.05 ppbW
CO	<0.5 ppmV	Cr	≤10 ppbW	Zn	≤10 ppbW
CO2	<0.5 ppmV	Fe	≤10 ppbW	Si	≤10 ppbW
SIF4	<0.5 ppmV	Other Metal	≤500 ppbW	Pb	≤10 ppbW
SF6	<0.5 ppmV	K	≤5 ppbW	P	≤2 ppbW
HF	<5 ppmV	Mn	≤10 ppbW	Mg	≤10 ppbW
Al	≤10 ppbW	Na	≤5 ppbW	Ni	≤20 ppbW
As	≤10 ppbW	Th	≤0.1 ppbW	Cu	≤5 ppbW
				Mo	≤10 ppbW