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Tetramethylammonium hydroxide Tetramethyl ammonium hydroxide 75-59-2
Appearance: Colorless liquid
CAS NO.: 75-59-2
Formula: C4H13NO
M.W.: 91.15
Application:
Widely used in electronic industry , especially as positive resister developer ,silicon wafer wet etchant and super clean solution for CMP process. Also used in the manufacture of integrated circuits, liquid crystal displays, printed circuit boards, capacitors, sensors, and many other electronic components.
MIN | MAX | ||
Specifications | Assay % | 24.5 | 25.5 |
Carbonate ppm | 500 | ||
Chloride ppm | 10 | ||
Methano ppm | 300 | ||
Ca ppm | 1 | ||
Fe ppm | 1 | ||
Mg ppm | 1 | ||
K ppm | 1 | ||
Na ppm | 1 | ||
Color (APHA) | 10 |
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