Product Name: Hexamethyldisilazane
Synonyms: ((CH3)3Si)2NH;1,1,1,3,3,3-hexamethyl-disilazan;1,1,1-trimethyl-n-(trimethylsilyl)-silanamin;Disilazane, 1,1,1,3,3,3-hexamethyl-;BIS(TRIMETHYLSILYL)AMINE;HMDS;hexamethyl disilizane;HEXAMETHYLDISILYLAMINE
CAS: 999-97-3
MF: C6H19NSi2
MW: 161.39
EINECS: 213-668-5
Product Categories: organosilicon compound;Chemical Synthesis;Organometallic Reagents;Organosilicon;Materials for Surface Modification;Substrates and Electrode Materials;Electronic Chemicals;Materials Science;Micro/NanoElectronics;Organic and Printed Electronics;Semiconductor Grade Chemicals;Pharmaceutical Intermediates;Organics;Analytical Chemistry;Biochemistry;GC Derivatizing Reagents;Nucleosides, Nucleotides & Related Reagents;Protecting Agents for Hydroxyl and Amino Groups;Protecting Agents, Phosphorylating Agents & Condensing Agents;Si (Classes of Silicon Compounds);Silazanes;Silicon Compounds (for Synthesis);Silylation (GC Derivatizing Reagents);Si-N Compounds;Synthetic Organic Chemistry;Trimethylsilylation (GC Derivatizing Reagents);Blocking Agents;Protective Agents;Silylating Agents;API Intermediate
Mol File: 999-97-3.mol
Hexamethyldisilazane Structure
Hexamethyldisilazane Chemical Properties
Melting point -78 °C
Boiling point 125 °C(lit.)
density 0.774 g/mL at 25 °C(lit.)
vapor density 4.6 (vs air)
vapor pressure 20 hPa (20 °C)
refractive index n20/D 1.407(lit.)
Fp 57.2 °F
storage temp. 2-8°C
solubility Miscible with acetone, benzene, ethyl ether, heptane and perchloroethylene.
form Liquid
pka 30(at 25℃)
color Colorless
Specific Gravity 0.774
Odor Ammonia odour
PH Range 8.5
explosive limit 0.8-25.9%(V)
Water Solubility REACTS
Hydrolytic Sensitivity 7: reacts slowly with moisture/water
Sensitive Moisture Sensitive
Merck 14,4689
BRN 635752
InChIKey FFUAGWLWBBFQJT-UHFFFAOYSA-N
CAS DataBase Reference 999-97-3(CAS DataBase Reference)
NIST Chemistry Reference Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-(999-97-3)
EPA Substance Registry System Hexamethyldisilazane (999-97-3)
Safety Information
Hazard Codes F,C,Xn
Risk Statements 11-20/21/22-34-52/53
Safety Statements 16-26-36/37/39-45-61
RIDADR UN 3286 3/PG 2
WGK Germany 2
RTECS JM9230000
F 21
Autoignition Temperature 325 °C
Hazard Note Flammable
TSCA Yes
HS Code 2931 90 00
HazardClass 3
PackingGroup II