15112-89-7 N,N',N''-(Silanetriyl)tris(dimethylamine) N,N',N''-Silanetriyltris(dimethylamine)
Product Name: TRIS(DIMETHYLAMINO)SILANE
Synonyms: TRIS(DIMETHYLAMINO)SILANE;n,n,n’,n’,n’’,n’’-hexamethyl-silanetriamin;n,n,n’,n’,n’’,n’’-hexamethylsilanetriamine;N,N,N’,N’,N’’,N’’-hexamethyl-Silanetriamine;TRIS(DIMETHYLAMINO)SILANE 99+%;N,N',N''-(Silanetriyl)tris(dimethylamine);N,N',N''-Silanetriyltris(dimethylamine);TRIS(DIMETHYLAMINO)SILANE, 99.9+%
CAS: 15112-89-7
MF: C6H19N3Si
MW: 161.32
EINECS: 239-165-0
Product Categories: ALD Precursors;organosilicon compounds
Mol File: 15112-89-7.mol
TRIS(DIMETHYLAMINO)SILANE Structure
TRIS(DIMETHYLAMINO)SILANE Chemical Properties
Melting point <0°C
Boiling point 145 °C
density 0,838 g/cm3
refractive index 1.4247
Fp 25°C
pka 10.93±0.70(Predicted)
form liquid
Specific Gravity 0.84
color colorless to light yellow
Hydrolytic Sensitivity 8: reacts rapidly with moisture, water, protic solvents
Sensitive air sensitive, moisture sensitive
EPA Substance Registry System N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7)
Safety Information
Hazard Codes F,C
Risk Statements 10-36/37/38-52/53-34-29-20-15-11
Safety Statements 16-26-36/37/39-45-43
RIDADR 1993
WGK Germany 3
RTECS VV5800000
TSCA Yes
Product Name: TRIS(DIMETHYLAMINO)SILANE
Synonyms: TRIS(DIMETHYLAMINO)SILANE;n,n,n’,n’,n’’,n’’-hexamethyl-silanetriamin;n,n,n’,n’,n’’,n’’-hexamethylsilanetriamine;N,N,N’,N’,N’’,N’’-hexamethyl-Silanetriamine;TRIS(DIMETHYLAMINO)SILANE 99+%;N,N',N''-(Silanetriyl)tris(dimethylamine);N,N',N''-Silanetriyltris(dimethylamine);TRIS(DIMETHYLAMINO)SILANE, 99.9+%
CAS: 15112-89-7
MF: C6H19N3Si
MW: 161.32
EINECS: 239-165-0
Product Categories: ALD Precursors;organosilicon compounds
Mol File: 15112-89-7.mol
TRIS(DIMETHYLAMINO)SILANE Structure
TRIS(DIMETHYLAMINO)SILANE Chemical Properties
Melting point <0°C
Boiling point 145 °C
density 0,838 g/cm3
refractive index 1.4247
Fp 25°C
pka 10.93±0.70(Predicted)
form liquid
Specific Gravity 0.84
color colorless to light yellow
Hydrolytic Sensitivity 8: reacts rapidly with moisture, water, protic solvents
Sensitive air sensitive, moisture sensitive
EPA Substance Registry System N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7)
Safety Information
Hazard Codes F,C
Risk Statements 10-36/37/38-52/53-34-29-20-15-11
Safety Statements 16-26-36/37/39-45-43
RIDADR 1993
WGK Germany 3
RTECS VV5800000
TSCA Yes
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