TRIS(DIMETHYLAMINO)SILANE

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TRIS(DIMETHYLAMINO)SILANE n,n,n',n',n'',n''-hexamethyl-silanetriamin

Appearance:colorless liq.
Application:Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films.
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