Add time:08/01/2019         Source:sciencedirect.com

Tungsten oxide thin films are grown by DC reactive magnetron sputtering combining glancing angle deposition (GLAD) and reactive gas pulsing process (RGPP). Inclined, zigzag and spiral columnar architectures are produced with various oxygen injections during the growth. The dodecane and ozone sensing properties of these tungsten oxide nanostructured active layers are comparatively studied with that of films deposited by conventional sputtering process. Microstructure, morphologies and electrical behaviors are characterized as a function of the growing conditions. As-deposited films systematically exhibit an amorphous crystal structure with a porous microstructure, which depends on the GLAD architecture. Annealing at 300 °C in air for 12 h leads to a polycrystalline structure keeping voided networks. Dodecane and ozone sensing performances are the most significant for inclined columnar architectures but they also depend on the RGPP sputtering conditions. As a result, the GLAD + RGPP combination proves to be a relevant strategy for the fabricating tungsten oxide nanostructured films as active layers with an attractive potential for gas sensors.

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