Add time:08/14/2019         Source:sciencedirect.com

Adsorption kinetics of DIMETHYLSILANE (cas 1111-74-6) (DMS) at Si(0 0 1) surface has been investigated by using temperature-programmed desorption (TPD). The saturated hydrogen coverage of two monolayer was identical with that from monomethylsilane (MMS)-saturated surface. By being combined with the C/H ratios within a molecule (1/6 for MMS and 1/4 for DMS), this fact suggests enhanced C incorporation by DMS as compared with MMS by a factor of 1.5. The TPD spectra are deconvoluted into β1 (∼510 °C), β1′ (∼550 °C), γ (∼615 °C) and δ (∼910 °C) peaks. The appearance of the bulk C-related γ peak from the very initial adsorption, in contrast to MMS, is consistent with the enhanced C incorporation. Although the hydrogen uptake (H-uptake) curve is quantitatively fitted with the four-site adsorption model, discussions on the sub-peak assignments suggest presence of further decompositions of ad-species at initial adsorptions.

We also recommend Trading Suppliers and Manufacturers of DIMETHYLSILANE (cas 1111-74-6). Pls Click Website Link as below: cas 1111-74-6 suppliers