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Permanent optical waveguides have been produced by proton implantation in LilO 3 single crystals by using a Van De Graaff accelerator. The effects of the crystal cut and of the implantation parameters on the optical waveguides properties, investigated by dark line mode spectroscopy, are presented. The profiles of the ordinary and extraordinary refractive indices are reconstructed by an inverse WKB method. Optical barriers with depths of few hundredths (Δn < 0) are currently obtained and their location can be accurately adjusted from 4 to 17 μm.
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