Add time:09/30/2019         Source:infona.pl

Carbon thin films were prepared from DECACYCLENE (cas 191-48-0) on quartz substrates with a chemical vapor deposition (CVD) process at 900°C under various conditions. The thickness and the electrical conductivity of these carbon thin films were measured by analytical instruments. As a result, it was found that the thickness of the obtained carbon thin films was controlled in the range of 0.1- 1.5mm by changing raw material, temperature, reaction time, and the flow rate of carrier gas, and the electrical conductivity tended to increase with decreasing thickness.

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