Add time:07/20/2019         Source:sciencedirect.com

For application to all-solid-state thin film batteries, lithium boron phosphorus oxynitride (LiBPON) thin films were fabricated by RF magnetron sputtering technique of lithium borate (Li3BO3) and lithium phosphate (Li3PO4) target under N2 atmosphere. To investigate the mixed former effect upon the LiBPON thin films, we prepared various films with controlled B and P contents. The LiBPON thin film formulation with nearly equal B and P contents showed the highest room-temperature lithium ionic conductivity of 3.52 × 10−6 S cm−1 and the lowest activation energy of 48.24 kJ mol−1 owing to the mixed former effect, the increased lithium content and nitridation. Infrared spectra of the glass thin films achieved two dominant peaks corresponding to BO33− and PO43− unit. N1s spectra were analyzed by X-ray photoelectron spectroscopy that the increased ionic conductivities observed were related to the formation of triply coordinated nitrogen.

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