Phosphorous trifluoride
MATERIAL SAFETY DATA SHEET
1. CHEMICAL PRODUCT AND COMPANY IDENTIFICATION
MATHESON TRI-GAS, INC. Emergency Contact:
150 Allen Road Suite 302 CHEMTREC 1-800-424-9300
Basking Ridge, New Jersey 07920 Calls Originating Outside the US:
Information: 1-800-416-2505 703-527-3887 (Collect Calls Accepted)
SUBSTANCE: SDS? 2 PHOSPHORUS TRIFLUORIDE
TRADE NAMES/SYNONYMS:
PHOSPHOROUS FLUORIDE; TRIFLUOROPHOSPHINE; 00227186; RTECS TH3850000
CREATION DATE: Aug 03 2001
REVISION DATE: Dec 07 2006
2. COMPOSITION, INFORMATION ON INGREDIENTS
COMPONENT: PHOSPHOROUS TRIFLUORIDE
CAS NUMBER: 7783-55-3
PERCENTAGE: >99
OTHER CONTAMINANTS:
This gas is packaged in a SDS?(Safe Delivery Source Technology Cylinder). This cylinder contains an
adsorbent material (carbon) that allows gas contents to be at sub-atmospheric pressures. There is no
possibility of contact or exposure to the adsorbent material and so this MSDS addresses only the hazards of
the gas.
Maximum Impurities less than or equal to 1%.
None of the trace impurities of this gas contribute significantly to the hazards associated with the product.
All hazard information pertinent to this product has been provided in this Material Safety Data Sheet, per the
requirements of the Federal Occupational Safety and Health Administration Standard (29 CFR 1910.1200),
U.S. State equivalent standards and Canadian Workplace Hazardous Materials Identification System
Standards (CPR 4).
3. HAZARDS IDENTIFICATION
NFPA RATINGS (SCALE 0-4): HEALTH=3 FIRE=0 REACTIVITY=1
EMERGENCY OVERVIEW:
COLOR: colorless
PHYSICAL FORM: Solid proprietary carbon beads and toxic gas contained within a sealed stainless steel
cylinder.
MAJOR HEALTH HAZARDS: TOXIC GAS. If the stainless steel cylinder is opened, heated or otherwise
tampered with, release of gas may occur.
PHYSICAL HAZARDS: Containers may rupture or explode if exposed to heat. Contact with water or
moist air may generate flammable and/or toxic gases.
POTENTIAL HEALTH EFFECTS:
INHALATION:
SHORT TERM EXPOSURE: burns
LONG TERM EXPOSURE: same as effects reported in short term exposure
SKIN CONTACT:
SHORT TERM EXPOSURE: burns
LONG TERM EXPOSURE: same as effects reported in short term exposure
EYE CONTACT:
SHORT TERM EXPOSURE: burns
LONG TERM EXPOSURE: same as effects reported in short term exposure
INGESTION:
SHORT TERM EXPOSURE: ingestion of harmful amounts is unlikely
LONG TERM EXPOSURE: ingestion of harmful amounts is unlikely
4. FIRST AID MEASURES
INHALATION: If gas is inhaled, move victim to fresh air. If breathing has stopped, give artificial
respiration. If breathing is weak, give oxygen. Get medical attention without delay.
SKIN CONTACT: If this chemical contacts the skin, immediately flush the contaminated skin with soap
and water. If clothing is contaminated, immediately remove and flush the skin with soap and water. Get
medical attention promptly. Assume victim has also been exposed by inhalation.
EYE CONTACT: In case of eye contact, immediately flush eyes with plenty of water for at least 30 minutes,
occasionally lifting the lower and upper lids. Get medical attention immediately.
INGESTION: Ingestion is not a route of exposure.
NOTE TO PHYSICIAN: For inhalation, consider oxygen.
5. FIRE FIGHTING MEASURES
FIRE AND EXPLOSION HAZARDS: Heating of cylinder beyond pressure relief.
FIRE FIGHTING: Wear self-contained breathing apparatus with full face shield and protective clothing.
Apply cooling water to sides of container exposed to flame until well after fire is out. Isolate area until gas
has dispersed.
FLASH POINT: nonflammable gas
6. ACCIDENTAL RELEASE MEASURES
OCCUPATIONAL RELEASE:
Isolate area until gas has dispersed. Use appropriate protective equipment including self-contained breathing
apparatus. Be certain to flush lines and enclosures with inert gas before repairing.
7. HANDLING AND STORAGE
STORAGE: Store and handle in accordance with all current regulations and standards. Protect from
physical damage. Avoid direct sunlight. Store in a cool, dry, well ventilated area of non-combustible
construction. Keep away from cylinders of oxygen or other highly oxidizing or flammable materials. Ship
and store cylinders with outlet plug in place. Subject to storage regulations: U.S. OSHA 29 CFR 1910.101.
See original container for storage recommendations. Keep separated from incompatible substances.
HANDLING: Handle this material only in a sealed, purged system. Do not heat cylinder by any means to
increase discharge rate of product from the cylinder. In order to maintain the subatmospheric (<760 Torr)
package, SDS cylinder temperature should not exceed 24 C. If subject to temperature greater than 24 C
container may become pressurized which increases the risk of leakage and possible exposure to toxic gas.
8. EXPOSURE CONTROLS, PERSONAL PROTECTION
EXPOSURE LIMITS:
SDS? 2 PHOSPHORUS TRIFLUORIDE:
No occupational exposure limits established.
VENTILATION: Exhausted process enclosure recommended to meet published exposure limits. Use only
in a well ventilated area.
EYE PROTECTION: Wear safety glasses.
CLOTHING: Wear appropriate chemical resistant clothing.
GLOVES: Wear appropriate chemical resistant gloves.
RESPIRATOR: Respirators depend on exposure level. SCBA with full face piece recommended during
change outs and available in case of emergency.
9. PHYSICAL AND CHEMICAL PROPERTIES
PHYSICAL STATE: gas
COLOR: colorless
PHYSICAL FORM: Solid proprietary carbon beads and toxic gas contained within a sealed stainless steel
cylinder.
ODOR: Not available
MOLECULAR WEIGHT: 87.97
MOLECULAR FORMULA: P-F3
BOILING POINT: -150 F (-101 C)
FREEZING POINT: -242 F (-152 C)
VAPOR PRESSURE: 760 mmHg @ -101 C
VAPOR DENSITY (air=1): 3.03 @ 25 C
SPECIFIC GRAVITY: Not applicable
DENSITY: 3.907 g/L
WATER SOLUBILITY: reacts
PH: Not applicable
VOLATILITY: Not applicable
ODOR THRESHOLD: Not available
EVAPORATION RATE: Not applicable
VISCOSITY: 0.01871 cP @ 25 C
COEFFICIENT OF WATER/OIL DISTRIBUTION: Not applicable
10. STABILITY AND REACTIVITY
REACTIVITY: Contact with water or moist air may form flammable and/or toxic gases or vapors.
CONDITIONS TO AVOID: Exposure to air.
INCOMPATIBILITIES: Exposure to air.
HAZARDOUS DECOMPOSITION:
Thermal decomposition products: halogenated compounds, oxides of phosphorus
POLYMERIZATION: Will not polymerize.
11. TOXICOLOGICAL INFORMATION
SDS? 2 PHOSPHORUS TRIFLUORIDE:
LOCAL EFFECTS:
Corrosive: inhalation, skin, eye
MEDICAL CONDITIONS AGGRAVATED BY EXPOSURE: respiratory disorders
12. ECOLOGICAL INFORMATION
Not available
13. DISPOSAL CONSIDERATIONS
Dispose in accordance with all applicable regulations. Subject to disposal regulations: U.S. EPA 40 CFR 262.
Hazardous Waste Number(s): D003.
14. TRANSPORT INFORMATION
U.S. DOT 49 CFR 172.101:
PROPER SHIPPING NAME: Compressed gas, toxic, corrosive, n.o.s. (PHOSPHOROUS
TRIFLUORIDE SDS2)
ID NUMBER: UN3304
HAZARD CLASS OR DIVISION: 2.3
LABELING REQUIREMENTS: 2.3; 8
QUANTITY LIMITATIONS:
PASSENGER AIRCRAFT OR RAILCAR: Forbidden
CARGO AIRCRAFT ONLY: Forbidden
CANADIAN TRANSPORTATION OF DANGEROUS GOODS:
SHIPPING NAME: Compressed gas, toxic, corrosive, n.o.s. (PHOSPHOROUS TRIFLUORIDE SDS2)
UN NUMBER: UN3304
CLASS: 2.3; 8
15. REGULATORY INFORMATION
U.S. REGULATIONS:
CERCLA SECTIONS 102a/103 HAZARDOUS SUBSTANCES (40 CFR 302.4): Not regulated.
SARA TITLE III SECTION 302 EXTREMELY HAZARDOUS SUBSTANCES (40 CFR 355.30): Not
regulated.
SARA TITLE III SECTION 304 EXTREMELY HAZARDOUS SUBSTANCES (40 CFR 355.40): Not
regulated.
SARA TITLE III SARA SECTIONS 311/312 HAZARDOUS CATEGORIES (40 CFR 370.21):
ACUTE: Yes
CHRONIC: Yes
FIRE: No
REACTIVE: Yes
SUDDEN RELEASE: Yes
SARA TITLE III SECTION 313 (40 CFR 372.65): Not regulated.
OSHA PROCESS SAFETY (29CFR1910.119): Not regulated.
STATE REGULATIONS:
California Proposition 65: Not regulated.
CANADIAN REGULATIONS:
WHMIS CLASSIFICATION: Not determined.
NATIONAL INVENTORY STATUS:
U.S. INVENTORY (TSCA): Listed on inventory.
TSCA 12(b) EXPORT NOTIFICATION: Not listed.
CANADA INVENTORY (DSL/NDSL): Not determined.
16. OTHER INFORMATION
?Copyright 1984-2008 Symyx Technologies, Inc. All rights reserved.
MATHESON TRI-GAS, INC. MAKES NO EXPRESS OR IMPLIED WARRANTIES,
GUARANTEES OR REPRESENTATIONS REGARDING THE PRODUCT OR THE
INFORMATION HEREIN, INCLUDING BUT NOT LIMITED TO ANY IMPLIED WARRANTY
OF MERCHANTABILITY OR FITNESS FOR USE. MATHESON TRI-GAS, INC. SHALL NOT BE
LIABLE FOR ANY PERSONAL INJURY, PROPERTY OR OTHER DAMAGES OF ANY NATURE,
WHETHER COMPENSATORY, CONSEQUENTIAL, EXEMPLARY, OR OTHERWISE,
RESULTING FROM ANY PUBLICATION, USE OR RELIANCE UPON THE INFORMATION
HEREIN.
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