Sulfur hexafluoride...

Sulfur hexafluoride 99.9-99.999%

Sulfur hexafluoride 99.9-99.999%

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  • Purity: 99.9-99.999%

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SF6 SULFUR HEXAFLUORIDE 99.9-99.999% SF6 IEC60376

Quick Details

  • Appearance:
  • Application:Applications Fluorine source for high density plasma etching: offers high selectivity without generating carbon by-products.
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Description
Sulfur Hexafluoride,SF6 is a colorless, nonflammable, liquefied, compressed gas

 

Gas Data
Molecular Weight  146.05
Specific Gravity(Air=1)   5.1

Applications
Fluorine source for high density plasma etching: offers high selectivity without generating
carbon by-products.
Specifications

SF6
Property Unit Minimum Maximum
SF6 %vol 99.999 --
O2   ppmv -- 1
N2 ppmv -- 3
CO ppmv -- 0.5
CO2 ppmv -- 1
CF4 ppmv -- 2
H2O ppmv -- 2
HF   ppmv -- 0.1
THC(CH4) ppmv -- 1

 

Package
Cylinder Size   DOT3AA 2265-47L/DOT3AA 2265-43L
Valve  CGA 580 / 590 
This is common cylinders sizes.RUIHUA fills customer owned cylinders.

Shipping Information
DOT Label   Green, Nonflammable Gas
DOT Class   2.2
CAS No.:   2551-62-4
UN Number   108

 

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