- Min.Order :0 Metric Ton
- Purity: 99.999
Keywords
Tungsten Hexafluoride Tungsten Hexafluoride WF6
Quick Details
- Appearance:
- Application:· In semiconductor fabrication: low pressure or plasma-enhanced CVD of tungsten and tungsten silicides.
- PackAge:
- ProductionCapacity:|Metric Ton|Day
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Superiority:
Tungsten Hexafluoride is a pale yellow , toxic , non-flammable , odorless extremely corrosive gas . It reacts violently with water to form hydrofluoric acid . It is shipped in nickel cylinders as a liquefied gas .
Details:
| Ship | |
| DOT Shipping Name | Tungste Hexafluoride |
| DOT Classification | 2.3 |
| DOT Label | Poison Gas Corrosive |
| UN Number | UN 2196 |
| CAS No. | 7783-82-6 |
| CGA/DISS/JIS | 670/638/W22-14R |
| Shipped as | Liquefied Gas |
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