- Min.Order :0 Metric Ton
- Purity: 99.99
Keywords
Nitrogen Trifluoride - ( NF3 ) Nitrogen Trifluoride Nitrogen Trifluoride
Quick Details
- Appearance:
- Application:· Used for cleaning CVD Chamber or etching vapor deposition layer ( film ) during the production process of semiconductor ,TFT -LCD and solar cell.
- PackAge:
- ProductionCapacity:|Metric Ton|Day
- Storage:
- Transportation:
Superiority:
Nitrogen Trifluoride is a colorless , stable , oxidizing , toxic gas with a characteristic moldy odor . It is shipped in steel cylinders as a non-liquefied gas.
Details:
| Ship | |
| DOT Shipping Name | Nitrogen Trifluoride |
| DOT Classification | 2.2 |
| DOT Label | Nonflammable Gas and Oxidizer |
| UN Number | UN 2451 |
| CAS No. | 7783-54-2 |
| DISS/JIS/DIN477 | 640/W22-14L/NO.6 |
| Shipped as | Liquefied Gas |
| Technical Information | |
| Cylinder State @ 21.1°C | Gas |
| Flammable Limits In Air | Non-flammable |
| Auto Ignition Temperature (°C ) | - |
| Molecular Weight (g/mol) | 71 |
| Specific gravity (air =1) | 2.46 |
| Critical Temperature ( °C ) | -39.15 |
| Critical Pressure ( psig ) | 632.19 |
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