Halocarbon 23 - ( CHF3 , Trifluoromethane )
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- Purity: 99.99
Keywords
Halocarbon 23 - ( CHF3 , Trifluoromethane ) Halocarbon 23 Trifluoromethane
Quick Details
- Appearance:
- Application:· Trifluoromethane (CHF3) is used in plasma etching of silicon oxide or nitride layers. · CHF3 is a low temperature refrigerant. I
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Superiority:
Trifluoromethane is a colorless , non-flammable and liquefied gas .It is shipped as a liquefied gas under its own vapor pressure .
Details:
| Ship | |
| DOT Shipping Name | Trifluoromethane |
| DOT Classification | 2.2 |
| DOT Label | Non-flammable |
| UN Number | UN 1984 |
| CAS No. | 75-46-7 |
| CGA/DISS/JIS | 660/716/W22-14L |
| Shipped as | Liquefied Gas |
| Technical Information | |
| Cylinder State @ 21.1°C | Liquid |
| Flammable Limits In Air | Non-flammable |
| Auto Ignition Temperature (°C ) | - |
| Molecular Weight (g/mol) | 70 |
| Specific gravity (air =1) | 2.436 |
| Critical Temperature ( °C ) | 178.43 |
| Critical Pressure ( psig ) | 686.719 |
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