NITROGEN TRIFLUORIDE supplier

Name
Nitrogen trifluoride
EINECS 232-007-1
CAS No. 7783-54-2
Article Data107
CAS DataBase
Density 1.361 g/cm³
Solubility Solubility in water 0.021 vol/vol (20 °C, 1 bar)
Melting Point ?206.8 °C (66.35 K)
Formula F3N
Boiling Point -129 ºC
Molecular Weight 71.0019
Flash Point
Transport Information UN 2451
Appearance colorless gas
Safety 17-23-38
Risk Codes 8-20
Molecular Structure
Hazard Symbols O
Synonyms Nitrogentrifluoride; Perfluoroammonia; Trifluoroamine; Trifluoroammonia
PSA 3.24000
LogP 0.94190

Synthetic route

: 400090-26-8
(Cl2Te)2N(1+)*GaCl4(1-)=[(Cl2Te)2N]GaCl4

: 7784-36-3
arsenic pentafluoride

A: 7783-54-2
nitrogen trifluoride

B: [(Cl2Te)2AsF](2+)*[GaCl4](1-)*[AsF6](1-)*AsF5=[(Cl2Te)2AsF][GaCl4][AsF6](AsF5)

Conditions

Conditions	Yield
In liquid sulphur dioxide Ga-compd.:AsF5 molar ratio was 1:2.5, stirring for 12 h at 20 °C; soln. was concd. in vac., crystn. on cooling, drying for 12 h. in vac. at 20 °C, elem. anal.; NF3 was detected by IR;	A n/a B 75%

...Expand

: 10036-47-2
tetrafluorohydrazine

: 201230-82-2
carbon monoxide

A: 7783-54-2
nitrogen trifluoride

B: 10578-16-2
dinitrogen difluoride

C: 353-50-4
Carbonyl fluoride

D: 2368-32-3
trifluoromethylamide

Conditions

Conditions	Yield
byproducts: N2O, CO2, SiF4; other Radiation; ratio of N2F4 and CO = 1:2, irradiation by high pressure Hg lamp for 2h at room temp.; fractionated distn.;	A n/a B n/a C n/a D 15%
byproducts: N2O, CO2, SiF4; other Radiation; ratio of N2F4 and CO = 1:2, irradiation by high pressure Hg lamp for 2h at room temp.; fractionated distn.;	A n/a B n/a C n/a D 15%

...Expand

: nitrogen

: 75-02-5
1-fluoroethylene

A: 7783-54-2
nitrogen trifluoride

B: 74-90-8
hydrogen cyanide

C: 7664-39-3
hydrogen fluoride

D: 7664-41-7
ammonia

Conditions

Conditions	Yield
byproducts: CH3CN, C2H2F2, CH2CN; in a Pyrex tube at 0.95 Torr; products were detected by mass spectrometry;

...Expand

: 7664-39-3
hydrogen fluoride

: 57-13-6
urea

: 7783-54-2
nitrogen trifluoride

Conditions

Conditions	Yield
In hydrogen fluoride Electrolysis; in anhydrous HF at -10°C;

: 10036-47-2
tetrafluorohydrazine

: silver nitrate

A: 7783-54-2
nitrogen trifluoride

B: silver fluoride

C: 10544-72-6
dinitrogen tetraoxide

D: 7789-25-5
nitrosyl fluoride

Conditions

Conditions	Yield
In neat (no solvent) 60°C, 18 h;;

...Expand

: ammonium bifluoride

A: 7783-54-2
nitrogen trifluoride

B: 7727-37-9
nitrogen

C: 1333-74-0
hydrogen

D: 10028-15-6
ozone

E: 10024-97-2
dinitrogen monoxide

Conditions

Conditions	Yield
In melt byproducts: O2; Electrolysis; reaction by electrolysis of molten NH4F*HF with a Cu cathode and a graphite anode at 125 °C;;
In melt byproducts: O2; Electrolysis; reaction by electrolysis of molten NH4F*HF with a Cu cathode and a graphite anode at 125 °C;;

...Expand

: 7664-41-7
ammonia

: 7782-41-4
fluorine

: 7783-54-2
nitrogen trifluoride

Conditions

Conditions	Yield
byproducts: N2, HF; violent reaction; further unidenfed products formed;
In neat (no solvent)
In neat (no solvent)
byproducts: N2, HF; violent reaction; further unidenfed products formed;

: 1495-50-7
cyanogen fluoride

: fluorine

A: 7783-54-2
nitrogen trifluoride

B: 75-73-0
carbon tetrafluoride

Conditions

Conditions	Yield
In neat (no solvent) quenching reaction at 1500-4000K;;

...Expand

: 7664-39-3
hydrogen fluoride

: 113-00-8
guanidine nitrate

A: 7783-54-2
nitrogen trifluoride

B: 75-73-0
carbon tetrafluoride

C: 7727-37-9
nitrogen

Conditions

Conditions	Yield
In hydrogen fluoride Electrolysis; at 15°C; ratio of NF3:CF4 = 2.5; 40 % soln. of guanidine in anhydrous liquid HF;
In hydrogen fluoride HF (liquid); Electrolysis; at 15°C; ratio of NF3:CF4 = 2.5; 40 % soln. of guanidine in anhydrous liquid HF;

...Expand

: 10578-16-2
dinitrogen difluoride

: 7782-41-4
fluorine

: 7783-54-2
nitrogen trifluoride

Conditions

Conditions	Yield
In neat (no solvent)
In neat (no solvent)	>99
In neat (no solvent)
In neat (no solvent)	>99

: 7664-39-3
hydrogen fluoride

: 4426-72-6, 51433-48-8
hydrazine carboxamide

A: 10036-47-2
tetrafluorohydrazine

B: 7783-54-2
nitrogen trifluoride

C: 75-73-0
carbon tetrafluoride

D: 353-50-4
Carbonyl fluoride

Conditions

Conditions	Yield
In hydrogen fluoride byproducts: CO2, N2, C; Electrolysis; 1 M soln. of semicarbazide in anhydrous liquid HF; 5.6-5.7 V; ratio of NF3 : CF4 depends on potential used;	A 0% B n/a C n/a D n/a
In hydrogen fluoride byproducts: CO2, N2, C; HF (liquid); Electrolysis; 1 M soln. of semicarbazide in anhydrous liquid HF; 5.6-5.7 V; ratio of NF3 : CF4 depends on potential used;	A 0% B n/a C n/a D n/a

...Expand

: 10036-47-2
tetrafluorohydrazine

: 373-91-1
hypofluorous acid trifluoromethyl ester

A: 7783-54-2
nitrogen trifluoride

B: 75-73-0
carbon tetrafluoride

C: 353-50-4
Carbonyl fluoride

D: 4217-93-0
N,N-Difluor-O-trifluormethylhydroxylamin

Conditions

Conditions	Yield
Irradiation (UV/VIS); ambient temp.;

...Expand

: 13773-81-4
krypton difluoride

: 335-01-3
difluoramino trifluoromethane

: 7784-36-3
arsenic pentafluoride

A: 7783-54-2
nitrogen trifluoride

B: 13776-62-0
trans-1,2-difluorodiazine

Conditions

Conditions	Yield
With HF In hydrogen fluoride byproducts: CF4; HF (liquid); reagents were mixed at -196°C for 3 h;

...Expand

: 372-48-5
2-fluoropyridine

: 7664-39-3
hydrogen fluoride

: 7783-54-2
nitrogen trifluoride

Conditions

Conditions	Yield
In hydrogen fluoride Electrolysis;

: 1512-14-7
S,S-difluoro-N-trifluoromethyl-sulfimide

A: 7783-54-2
nitrogen trifluoride

B: 75-73-0
carbon tetrafluoride

C: 335-01-3
difluoramino trifluoromethane

D: 359-62-6
fluoro-bis-trifluoromethyl-amine

E: 2551-62-4
sulfur(VI) hexafluoride

Conditions

Conditions	Yield
Electrochem. Process; electrochemical fluorination, further product: CHF3;
Electrochem. Process; electrochemical fluorination, further product: CHF3;

...Expand

: 580-21-2
2-fluoroquinoline

: 7664-39-3
hydrogen fluoride

: 7783-54-2
nitrogen trifluoride

Conditions

Conditions	Yield
In hydrogen fluoride Electrolysis;

: 4101-37-5
pentafluoroethyliminosulfur difluoride

A: 7783-54-2
nitrogen trifluoride

B: 75-73-0
carbon tetrafluoride

C: 76-16-4
Hexafluoroethane

D: 354-80-3
Perfluoroethylamine

E: 2551-62-4
sulfur(VI) hexafluoride

Conditions

Conditions	Yield
Electrochem. Process; electrochemical fluorination, further products: C2F5H and CHF3;
Electrochem. Process; electrochemical fluorination, further products: C2F5H and CHF3;

...Expand

: 7783-41-7
difluoroether

: 7789-25-5
nitrosyl fluoride

A: 7783-54-2
nitrogen trifluoride

B: 80937-33-3
oxygen

Conditions

Conditions	Yield
In neat (no solvent) NOF is passed into OF2;;
In neat (no solvent) NOF is slowly passed into a vessel filled with OF2; inflammation;;
In neat (no solvent) NOF is passed into OF2;;
In neat (no solvent) NOF is slowly passed into a vessel filled with OF2; inflammation;;

...Expand

: NH4(1+)*F(1-)*2HF = NH4F*2HF

: 7783-54-2
nitrogen trifluoride

Conditions

Conditions	Yield
In melt byproducts: N2, O2, N2F2; Electrolysis; 25 mA/cm**2, 100°C; further byproducts; XRD; SEM; XPS;
In melt byproducts: N2, N2F2, H2; Electrolysis; electrolysis of molten NH4F2HF with and without LiF conducted at 25 mA/cm*2 for 120 h with Ni or nickel-nickel oxide composite anodes; electrolyte kept at 100°C;

: NH4(1+)*F(1-)*2HF = NH4F*2HF

: 7782-41-4
fluorine

: 7783-54-2
nitrogen trifluoride

Conditions

Conditions	Yield
In melt F2 and molten NH4F*2HF at 90°C;;

: 460-19-5
ethanedinitrile

: 7727-37-9
nitrogen

: 7782-41-4
fluorine

A: 7783-54-2
nitrogen trifluoride

B: 75-73-0
carbon tetrafluoride

C: 76-16-4
Hexafluoroethane

D: 335-01-3
difluoramino trifluoromethane

E: 359-62-6
fluoro-bis-trifluoromethyl-amine

Conditions

Conditions	Yield
further products; by heating to 175-250°C;
further products; by heating to 175-250°C;

...Expand

: 10036-47-2
tetrafluorohydrazine

: 460-19-5
ethanedinitrile

A: 7783-54-2
nitrogen trifluoride

B: 75-73-0
carbon tetrafluoride

C: 354-80-3
Perfluoroethylamine

D: 5131-88-4
N,N-Difluor-cyanodifluormethylamin

E: 1426-41-1
N,N,N',N'-Tetrafluor-1,2-diamino-1,1,2,2-tetrafluor-ethan

...Expand

: 16871-76-4
tetrafluoroammonium hexafluoroantimonate

: 177570-08-0, 7789-30-2, 676353-69-8
bromine pentafluoride

: 65391-03-9
Cs(1+)*BrOF4(1-)=CsBrOF4

A: 7783-54-2
nitrogen trifluoride

B: 16949-12-5
cesium hexafluoroantimonate

Conditions

Conditions	Yield
byproducts: BrF3O; addn. at -196°C, stirred at 20°C for 2.5 h, cooled to -196°C; the noncondensable material distd. off, the voleatile material sept. byfractional distn., the solid nonvolatile product determined by Raman spetr.;

...Expand

: ammonium fluoride

A: 7783-54-2
nitrogen trifluoride

B: 7727-37-9
nitrogen

C: 1333-74-0
hydrogen

D: 80937-33-3
oxygen

Conditions

Conditions	Yield
In water Electrolysis; no product but evolution of H2 (cathode) and N2/O2 (anode);;	A 0% B n/a C n/a D n/a
In water Electrolysis; no product but evolution of H2 (cathode) and N2/O2 (anode);;	A 0% B n/a C n/a D n/a

...Expand

: ammonium fluoride

: 7783-54-2
nitrogen trifluoride

Conditions

Conditions	Yield
In water Electrolysis; concd. soln.;;
In water Electrolysis; concd. soln.;;

: ammonium fluoride

: 7782-41-4
fluorine

A: 10405-27-3
difluoroamine

B: 7783-54-2
nitrogen trifluoride

C: 3744-07-8
difluoroamino radical

D: 13967-06-1
N-monofluoroamine

...Expand

: 10036-47-2
tetrafluorohydrazine

: 7790-91-2
chlorine trifluoride

A: 7783-54-2
nitrogen trifluoride

B: 7790-89-8
chlorine monofluoride

Conditions

Conditions	Yield
In neat (no solvent) Kinetics; at 180 - 210°C in Al tube;;

...Expand

: 13693-06-6
plutonium hexafluoride

: 7727-37-9
nitrogen

: 7783-54-2
nitrogen trifluoride

Conditions

Conditions	Yield
100 Torr PuF6, 2250 Torr N2, room temp., 229 d;
100 Torr PuF6, 2250 Torr N2, room temp., 229 d;

: 7727-37-9
nitrogen

: 7782-41-4
fluorine

: 7783-54-2
nitrogen trifluoride

: 110-89-4
piperidine

: 7664-39-3
hydrogen fluoride

: 7783-54-2
nitrogen trifluoride

Conditions

Conditions	Yield
In hydrogen fluoride Electrolysis; electrolysis of piperidine in liq. HF;; fractional distn.;;
In hydrogen fluoride Electrolysis; electrolysis of piperidine in liq. HF;; fractional distn.;;

: 7783-54-2
nitrogen trifluoride

: zeolite H-SSZ-32

: 7784-18-1
aluminum(III) fluoride

Conditions

Conditions	Yield
In neat (no solvent) plasma react. in inductively coupled tubular reactor, temp. of reactor exterior <=180°C, 200 mg of powdered precursor in alumina boat, power of 150-200 W, chamber pressure of 250 mTorr, NF3 flow rate of 10 sccm, reaction time of 10-20 min; X-ray diffraction anal.; EDX anal.; chem. anal.;	99%

: 7783-54-2
nitrogen trifluoride

: 7783-70-2
antimony pentafluoride

: 10024-97-2
dinitrogen monoxide

: 12528-55-1
NF2O(1+)*Sb2F11(1-) =(NF2O)(Sb2F11)

Conditions

Conditions	Yield
byproducts: N2; 150°C;	99%
100°C;	0%

...Expand

: 7783-54-2
nitrogen trifluoride

: 13773-81-4
krypton difluoride

: 7784-36-3
arsenic pentafluoride

: 16871-75-3
NF4(1+)*AsF6(1-)

Conditions

Conditions	Yield
In neat (no solvent) byproducts: Kr; mixt. of KrF2, AsF5 and NF3 (molar ratio 2:1:7) was loaded in stainlesssteel cylinder at -196°C, warmed slowly to room temp. over 30 h,kept at 53°C for 4 d, cooled to -210°C on N2 slush bath; volatiles sepd. by fractional condensation through traps at -156 and -210°C; identified by IR and Raman spectra;	96.7%

...Expand

: 7783-54-2
nitrogen trifluoride

: 201230-82-2
carbon monoxide

A: 75-73-0
carbon tetrafluoride

B: 353-50-4
Carbonyl fluoride

C: 10102-43-9
nitrogen(II) oxide

D: 7789-25-5
nitrosyl fluoride

E: 10102-44-0
Nitrogen dioxide

Conditions

Conditions	Yield
nickel tube, equimolar amt., 825°C;	A n/a B 80% C n/a D n/a E n/a

...Expand

: 7783-54-2
nitrogen trifluoride

: 371-71-1
Perfluoro-2-azapropen

: 686-39-5
tris-trifluoromethyl-carbamimidoyl fluoride

Conditions

Conditions	Yield
550°C, in presence of CsF;	41.7%
550°C, in presence of CsF;	41.7%

: 7783-54-2
nitrogen trifluoride

: 506-77-4
cyanogen chloride

A: 675-14-9
trifluoro-[1,3,5]triazine

B: 73513-59-4
cis-hexafluoroazomethane

C: 371-71-1
Perfluoro-2-azapropen

Conditions

Conditions	Yield
In not given at 500°C, in Ni-tube, in excess of NF3;	A 40% B 30% C 30%

...Expand

: 7783-54-2
nitrogen trifluoride

: 13773-81-4
krypton difluoride

: 7637-07-2
boron trifluoride

: 15640-93-4
tetrafluoroammonium tetrafluoroborate

Conditions

Conditions	Yield
In neat (no solvent) byproducts: Kr; KrF2, BF3 and NF3 (molar ratio 2:1:7) was loaded in stainless steel cylinder at -196°C, warmed slowly to room temp. over 30 h, kept at 53°C for 4 d, cooled to -210°C on N2 slush bath; volatiles sepd. by fractional condensation through traps at -156 and -210°C;	30.6%
In hydrogen fluoride KrF2, BF3 and NF3 was loaded into cylinder at -196°C, warmed slowly to 25°C, kept at 25°C for 3 h;	28.1%
In hydrogen fluoride KrF2, BF3 and NF3 was loaded into cylinder at -196°C, warmed slowly to -78°C, kept at -78°C for 3 h;	7.1%

...Expand

: 7783-54-2
nitrogen trifluoride

: 7446-11-9
sulfur trioxide

A: 640723-20-2, 2699-79-8, 12769-73-2
fluorosulfonyl fluoride

B: 2NO(1+)*S2O5F4(2-)=(NO)2S2O5F4

C: 7783-42-8
thionyl fluoride

D: 2551-62-4
sulfur(VI) hexafluoride

Conditions

Conditions	Yield
byproducts: NO, NO2; 520 °C, nickel tube;	A 30% B n/a C 4% D <1

...Expand

: 7783-54-2
nitrogen trifluoride

: 506-77-4
cyanogen chloride

: 73513-59-4
cis-hexafluoroazomethane

Conditions

Conditions	Yield
at 500°C;	30%
at 500°C;	30%

: 7783-54-2
nitrogen trifluoride

: 506-77-4
cyanogen chloride

: 371-71-1
Perfluoro-2-azapropen

Conditions

Conditions	Yield
500°C, in a flow system (contact time=0.6 s);	30%
500°C, in a flow system (contact time=0.6 s);	30%

: 75-15-0
carbon disulfide

: 7783-54-2
nitrogen trifluoride

: 420-32-6
thiocarbonyl fluoride

Conditions

Conditions	Yield
>1500°C;	16%

: 7783-54-2
nitrogen trifluoride

: 371-71-1
Perfluoro-2-azapropen

: 13400-13-0
cesium fluoride

: 338-66-9
perfluoromethanimine

Conditions

Conditions	Yield
by pyrolysis over CsF at 540 to 560°C;	6.7%
by pyrolysis over CsF at 540 to 560°C;	6.7%

...Expand

: 7783-54-2
nitrogen trifluoride

: 7637-07-2
boron trifluoride

: 7782-41-4
fluorine

: 15640-93-4
tetrafluoroammonium tetrafluoroborate

Conditions

Conditions	Yield
In neat (no solvent) Irradiation (UV/VIS); equivalent mixture of NF3, F2 and BF3, 298K, 6.5atm;;	1%
In neat (no solvent) Irradiation (UV/VIS); equivalent mixture of NF3, F2 and BF3, 298K, 6.5atm;;	1%
In neat (no solvent) 5.6mmol BF3, 6.1mmol NF3, contineous react. with F2 at 30Torr and 0.4l/h, 5kV, 30mA, 20min; heating to 60°C, removal of volatile components in vac.;; heating to 200.degreee.C in vac. for 30-40min;;	>99

...Expand

: 7783-54-2
nitrogen trifluoride

: 7446-11-9
sulfur trioxide

A: 640723-20-2, 2699-79-8, 12769-73-2
fluorosulfonyl fluoride

B: 2551-62-4
sulfur(VI) hexafluoride

Conditions

Conditions	Yield
under pressure, 230-440 °C, molar ratio 1:1;

...Expand

: 7783-54-2
nitrogen trifluoride

: 7446-11-9
sulfur trioxide

: 2551-62-4
sulfur(VI) hexafluoride

Conditions

Conditions	Yield
under pressure, 230-440 °C, molar ratio of NF3:SO3 = 2:1;

boron: boron

: 7783-54-2
nitrogen trifluoride

: 7637-07-2
boron trifluoride

Conditions

Conditions	Yield
byproducts: N2; at red heat (with fire);

: 7783-54-2
nitrogen trifluoride

: 7440-39-3
barium

: barium fluoride

Conditions

Conditions	Yield
In neat (no solvent) byproducts: Ba3N2; heating of Ba with NF3 at approx. 200°C under formation of BaF2 with some Ba3N2;;

: 7440-69-9
bismuth

: 7783-54-2
nitrogen trifluoride

: 10036-47-2
tetrafluorohydrazine

Conditions

Conditions	Yield
byproducts: Bi fluoride; thermic reaction;;
byproducts: Bi fluoride; thermic reaction;;

: 7783-54-2
nitrogen trifluoride

: 112926-00-8, 7631-86-9
silica gel

: 7783-61-1
silicon tetrafluoride

Conditions

Conditions	Yield
In neat (no solvent) Kinetics; etching of SiO2 film on Si wafer by NF3/Ar mixt.; detd. by FTIR;
In neat (no solvent) calcination of SiO2 and NF3;;
In neat (no solvent) calcination of SiO2 and NF3;;

: 7783-54-2
nitrogen trifluoride

: 7440-67-7
zirconium(IV) oxide

: 851363-60-5, 7783-64-4
zirconium(IV) fluoride

Conditions

Conditions	Yield
sample fluorination at 250 and 300°C for 4 h; XRD;

: 7783-54-2
nitrogen trifluoride

: 124-38-9
carbon dioxide

A: 353-50-4
Carbonyl fluoride

B: 7789-25-5
nitrosyl fluoride

Conditions

Conditions	Yield
825°C, Ni-tube;

...Expand

NITROGEN TRIFLUORIDE Chemical Properties

NITROGEN TRIFLUORIDE（7783-54-2） is the chemical compound with the formula F₃N .Its molar weight is 71.
NITROGEN TRIFLUORIDE（7783-54-2） chemical structural formula is

Synonyms：N,N,N-Trifluoroamine;NF₃;Nitrogen fluoride (NF₃);nitrogenfluoride(nf₃);Perfluoroammonia;Stickstoff(III)-fluorid;Stickstofftrifluorid;Trifluoroamine

mp： -207 ℃
bp： -129 ℃
Water Solubility： insoluble
CAS ：7783-54-2

NITROGEN TRIFLUORIDE Uses

NITROGEN TRIFLUORIDE（7783-54-2）is used in the plasma etching of silicon wafers. Today it is mainly employed in the cleaning of the PECVD chambers in the high volume production of liquid crystal displays and silicon-based thin film solar cells. In these applications NF₃ is initially broken down in situ, by a plasma. The resulting fluorine atoms are the active cleaning agents that attack the polysilicon,silicon nitride and silicon oxide. Nitrogen trifluoride can be used as well with tungsten silicide, and tungsten produced by CVD. Erroneously NF₃ has been considered as an environmentally preferable substitute for perfluorocarbons such as hexafluoroethane,sulfur hexafluoride etc. The process utilization of the chemicals applied in plasma processes is typically below 20 %. Therefore some of the PFCs and also of the NF₃ always escape into the atmosphere. Modern gas abatement systems can decrease such emissions.

Recently elemental fluorine has been introduced as an environmentally friendly replacement for nitrogen trifluoride in state-of-the-art high volume manufacturing of flat panel displays and solar cell manufacturing.

NITROGEN TRIFLUORIDE（7783-54-2） is also used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers. It is preferred to fluorine gas due to its convenient handling properties, reflecting its considerable stability.

It is compatible with steel and Monel, as well as several plastics.

NITROGEN TRIFLUORIDE Production

NF₃ is a rare example of a binary fluoride that cannot be prepared directly from the elements (i.e., N₂ does not react with F₂). Almost all other elements in the periodic table react directly, often violently, with fluorine.
Today, it is prepared both by direct reaction of ammonia and fluorine and by a variation of Ruff's method.It is supplied in pressurized cylinders.

NITROGEN TRIFLUORIDE Toxicity Data With Reference

1.	ihl-rat LC50:6700 ppm/1H	TXAPA9 Toxicology and Applied Pharmacology. 26 (1973),1.
2.	ihl-mus LC50:2000 ppm/4H	34ZIAG Toxicology of Drugs and Chemicals ,Deichmann, W.B.,New York, NY.: Academic Press, Inc.,1969,427.
3.	ihl-dog LC50:9600 ppm/1H	AMRL** Aerospace Medical Research Laboratory Report. (Aerospace Technical Div., Air Force Systems Command, Wright-Patterson Air Force Base, OH 45433) TR-69-84 ,1969.
4.	ihl-mky LC50:7500 ppm/1H	AMRL** Aerospace Medical Research Laboratory Report. (Aerospace Technical Div., Air Force Systems Command, Wright-Patterson Air Force Base, OH 45433) TR-69-84 ,1969.

NITROGEN TRIFLUORIDE Consensus Reports

Reported in EPA TSCA Inventory.

NITROGEN TRIFLUORIDE Safety Profile

A poison. Mildly toxic by inhalation. Prolonged absorption may cause mottling of teeth, skeletal changes. Severe explosion hazard by chemical reaction with reducing agents, particularly when under pressure. A very dangerous fire hazard; a very powerful oxidizer; otherwise inert at normal temperatures and pressures. Reacts violently when ignited with H2. When pure (dry) it does not attack glass or mercury at normal temperatures. Can react violently with NH3, CO, diborane, H2, H2S, CH4, tetrafluorohydrazine. Can react vigorously with reducing materials. Particularly hazardous under pressure. Incompatible with charcoal, hydrogen-containing compounds, tetrafluorohydrazine. When heated to decomposition it emits highly toxic fumes of F−. See also FLUORIDES.

NITROGEN TRIFLUORIDE Standards and Recommendations

OSHA PEL: TWA 10 ppm
ACGIH TLV: TWA 10 ppm; BEI: 3 mg/g creatinine of fluorides in urine prior to shift; 10 mg/g creatinine of fluorides in urine at end of shift.
NIOSH REL: (Inorganic Fluorides) TWA 2.5 mg(F)/m³
DOT Classification: 2.2; Label: Nonflammable Gas, Oxidizer

NITROGEN TRIFLUORIDE Specification

NF₃ is a greenhouse gas, with a GWP 17,200 times greater than that of CO₂ when compared over a 100 year period. Its GWP would place it second only to SF6 in the group of Kyoto-recognised greenhouse gases, although NF₃ is not currently included in that grouping. It has an estimated atmospheric lifetime of 740 years, although other work suggests a slightly shorter lifetime of 550 years (and a corresponding GWP of 16,800).

Product Name

Nitrogen trifluoride

Synthetic route

NITROGEN TRIFLUORIDE Chemical Properties

NITROGEN TRIFLUORIDE Uses

NITROGEN TRIFLUORIDE Production

NITROGEN TRIFLUORIDE Toxicity Data With Reference

NITROGEN TRIFLUORIDE Consensus Reports

NITROGEN TRIFLUORIDE Safety Profile

NITROGEN TRIFLUORIDE Standards and Recommendations

NITROGEN TRIFLUORIDE Specification

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